학술논문
Chemical vapor deposition of B-doped polycrystalline diamond films: Growth rate and incorporation efficiency of dopants.
Document Type
Article
Author
Source
Subject
*DIAMONDS
*THIN films
*POLYCRYSTALLINE semiconductors
*BORON
*CHEMICAL vapor deposition
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Language
ISSN
0021-8979
Abstract
Presents information on a study which examined the growth rate and the incorporation efficiency of dopants in the case of chemical vapor deposition of boron-doped polycrystalline diamond films. Characteristics of the films; Deposition of the films; Conclusions.