학술논문
Accurately determining the composition and thickness of layers in a GaAs/InGaAs superlattice.
Document Type
Article
Author
Source
Subject
*MOLECULAR beam epitaxy
*SUPERLATTICES
*TRANSMISSION electron microscopy
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Language
ISSN
0021-8979
Abstract
Presents information on a study which determined the thickness and composition of molecular beam epitaxy grown in a superlattice structure with nominal indium concentrations by transmission electron microscopy. Background of the study; Methodology of the study; Results and discussion.