학술논문

Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition.
Document Type
Article
Source
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Dec2022, Vol. 40 Issue 6, p1-15, 15p
Subject
CHEMICAL vapor deposition
POLYANILINES
POLYPYRROLE
CONJUGATED polymers
ORGANIC thin films
POLYTHIOPHENES
NANOSTRUCTURED materials
ELECTRONIC equipment
Language
ISSN
07342101
Abstract
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