학술논문
Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator wafer.
Document Type
Article
Source
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jul2022, Vol. 40 Issue 4, p1-6, 6p
Subject
Language
ISSN
21662746
Abstract
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