학술논문

Novel Method of Contactless Sensing of Mechanical Quantities.
Document Type
Article
Source
Measurement Science Review. Jun2020, Vol. 20 Issue 3, p150-156. 7p.
Subject
*ELECTROMAGNETIC fields
*PHYSICAL measurements
*PHYSICAL constants
*MEMS resonators
Language
ISSN
1335-8871
Abstract
This article addresses the method of sensing mechanical quantities, in particular force and pressure, without the electrical connection of the sensing element and the electronics. The information about the mechanical quantity is transmitted only by evaluating the changes in the electromagnetic field created around the sensor. The sensor is designed on the basis of a flexible micro-electro-mechanical element (MEMS), the resonance of which carries the information about the measured quantity. [ABSTRACT FROM AUTHOR]