학술논문

Metal-embedded SU-8 Slab Techniques for Low-resistance Micromachined Inductors.
Document Type
Article
Source
International Journal of Electrical & Computer Engineering (2088-8708); Dec2018 (Part I), Vol. 8 Issue 6, p4772-4780, 9p
Subject
SLABS
ELECTRIC inductance
LITHOGRAPHY
X-rays
MICROSTRUCTURE
WINDS
Language
ISSN
20888708
Abstract
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