학술논문

S3 targets monitoring with an electron gun.
Document Type
Article
Source
AIP Conference Proceedings; 2018, Vol. 1962 Issue 1, pN.PAG-N.PAG, 9p, 2 Color Photographs, 1 Black and White Photograph, 1 Diagram, 2 Charts, 3 Graphs
Subject
ELECTRON gun
IRRADIATION
ELECTRON beams
KRYPTON
ELECTRON beam deposition
Language
ISSN
0094243X
Abstract
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