부산대학교 도서관

A low cost recipe for thin film deposition of Potassium Sodium Niobate, (Na,K)NbO (KNN) is pursued. The use of expensive noble metals as electrodes was avoided and instead highly doped silicon was used for both the structural layer and the bottom electrode. Nickel was used for the top electrode. In order to evaluate the outcome, the films were studied in terms of stoichiometry, crystal structure and leakage current density. RF sputtering of thin films of KNN at room temperature was successfully done. Proper crystal structure (Perovskite structure) was achieved after post deposition annealing. Though the leakage current density exhibited high dependency on the polarity of the applied voltage, a leakage current density of 1 × 10 A/cm at 100 kV/ cm was measured. A stoichiometry study revealed that the relative ratio of the volatile elements (Na and K) in the samples was within the acceptable range, however, a total loss of about 25-33 % was observed. [ABSTRACT FROM AUTHOR]