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A Multiscale Attention Mechanism Super-Resolution Confocal Microscopy for Wafer Defect Detection

Document Type

Journal

Author

Sun, Xuefeng; Zhang, Baoyuan; Wang, Yushan; Mai, Jialuo; Wang, Yuhang; Tan, Jiubin; Wang, Weibo

Source

IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING; FEB 1 2024, 12p.

Subject

Language

English

ISSN

15583783

Online Access

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

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