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ZrO2-HfO2 Superlattice Ferroelectric Capacitors With Optimized Annealing to Achieve Extremely High Polarization Stability

Document Type

Journal

Author

Liang, Yan-Kui; Li, Wei-Li; Wang, Yong-Jyun; Peng, Li-Chi; Lu, Chun-Chieh; Huang, Huai-Ying; Yeong, Sai Hooi; Lin, Yu-Ming; Chu, Ying-Hao; Chang, Edward-Yi; Lin, Chun-Hsiung

Source

IEEE ELECTRON DEVICE LETTERS; SEP 2022, 43 9, p1451-p1454, 4p.

Subject

Language

English

ISSN

15580563

Online Access

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

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