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Effects of N-2-content on formation behavior in AlN thin films studied by NEXAFS: Theory and experiment

Document Type

Journal

Author

Supruangnet, Ratchadaporn; Sailuam, Wutthigrai; Busayaporn, Wutthikrai; Wattanawikkam, Chakkaphan; Jiamprasertboon, Arreerat; Ruangvittayanon, Anuchit; Sangsai, Weerayoot; Pirasampansiri, Anan; Limpijumnong, Sukit; Yimnirun, Rattikorn; Bootchanont, Atipong

Source

JOURNAL OF ALLOYS AND COMPOUNDS; DEC 5 2020, 844 p156128 8p.

Subject

Language

English

ISSN

18734669

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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