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Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries

Document Type

Journal

Author

Nazarov, Denis V.; Maximov, Maxim Yu.; Novikov, Pavel A.; Popovich, Anatoly A.; Silin, Aleksey O.; Smirnov, Vladimir M.; Bobrysheva, Natalia P.; Osmolovskaya, Olga M.; Osmolovsky, Michail G.; Rumyantsev, Aleksandr M.

Source

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A; JAN-FEB 2017, 35 1, p01B137 11p.

Subject

Language

English

ISSN

15208559

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

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