학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 56건 | 목록 1~10
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, DTCO and Computational Patterning III. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12954)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Design-Process-Technology Co-optimization XV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11614)
Academic Journal
In: Journal of Microlithography, Microfabrication and Microsystems. (Journal of Microlithography, Microfabrication and Microsystems, January 2004, 3(1):44-51)
Academic Journal
In: Semiconductor Science and Technology. (Semiconductor Science and Technology, June 2003, 18(6):512-516)
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제한된 항목
[AR] Zavyalova, L.
발행연도 제한
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