학술논문

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(예 : 2010-2015)
'학술논문' 에서 검색결과 12건 | 목록 1~10
Academic Journal
In: Microelectronic Engineering. (Microelectronic Engineering, April 2005, 77(3-4):204-209)
Academic Journal
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, September 2002, 20(5):1974-1981)
Academic Journal
AIChE Journal; Jul2004, Vol. 50 Issue 7, p1578-1588, 9p, 2 Black and White Photographs, 2 Charts, 7 Graphs
Academic Journal
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 5, p1974-1981, 8p
Periodical
Industrial & Engineering Chemistry Research; November 2003, Vol. 42 Issue: 24 p6080-6087, 8p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control for Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2006, 6152 II)
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제한된 항목
[AR] Yelehanka, P.
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