학술논문

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발행년	- (예 : 2010-2015)

전체선택

Removal of Macro Aluminum Defects on Wafer Backside

Conference

Patel, Akshit; Junquera, Trevor; Yu, Kun; Kuchibhatla, Sridhar; Sundaramoorthy, Nirmal; Sethupathi, Harith; Marble, Samuel; Biederman, Casey; Yatzor, Brett; O'Hara, Brian; Clements, Justin; Torcedo, Chris; Berardi, Marc; Sunkel, Elizabeth; Costello, Daniel; Reynolds, Tyler; Hatzistergos, Michael; Sih, Vincent; Morgenfield, Bradley; Famodu, Olugbenga

2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-3 May, 2023

Full Text (IEEE) Find it@PNU

Examining the Effect of Evaporation Field on Boron Measurements in SiGe: Insights into Improving the Relationship Between APT and SIMS Measurements of Boron.

Academic Journal

Martin, Andrew J.; Yatzor, Brett

Microscopy & Microanalysis; Jun2019, Vol. 25 Issue 3, p617-624, 8p

Full Text (Oxford University Press) Full Text (ProQuest Central) Open Access (EBSCO) Web of Science JCR 저널정보 Scopus Find it@PNU

UV Assisted Densification of Perhydropolysilazane (PHPS) Based Spin-On Glass in High Aspect Ratio Gap Fill Structure

Periodical

Mehta, Sanjay; Sheng, Haifeng; Krishnan, Rishikesh; Haran, Bala; Han, Tao; Bayindir, Zeynel; Berardi, Marc; Yatzor, Brett; Liu, Jinping; Shepard, Joseph; Grunow, Stephan

ECS Transactions; June 2018, Vol. 85 Issue: 13 p717-728, 12p

Full Text (IOP) Find it@PNU

Silicon Nitride Thickness Profile Tuning to Reduce Shallow Trench Isolation Variability in Planar CMOS.

Academic Journal

Rajachidambaram, Jaana; Gumpher, John; Sharma, Vineet; Tsao, Chia Hao; Yatzor, Brett

IEEE Transactions on Semiconductor Manufacturing. Aug2016, Vol. 29 Issue 3, p217-222. 6p.

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

A study on EUV reticle surface molecular contamination under different storage conditions in a HVM foundry fab

Periodical

Panning, Eric M.; Goldberg, Kenneth A.; Singh, SherJang; Yatzor, Brett; Taylor, Ron; Wood, Obert; Mangat, Pawitter

Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p101431T-101431T-7, 912887p

Find it@PNU

Image fusion combining SEM and ToF-SIMS images.

Academic Journal

Milillo, Tammy; Hard, Robert; Yatzor, Brett; Miller, Mary Ellen; Gardella, Joseph

Surface & Interface Analysis: SIA. Mar2015, Vol. 47 Issue 3, p371-376. 6p.

Full Text (Wiley Journals) Full Text (Wiley-DB) Web of Science JCR 저널정보 Scopus Find it@PNU

Potential release of hydrogen fluoride from domestic coal in endemic fluorosis area in Guizhou, China.

Academic Journal

Liang, HanDong; Liang, YanCi; Gardella, Joseph; He, Ping; Yatzor, Brett

Chinese Science Bulletin. Sep2011, Vol. 56 Issue 22, p2301-2303. 3p.

Open Access (EBSCO) Scopus Find it@PNU

Release of toxic elements from air-exposed coal of Guizhou, China

Academic Journal

Liang, Handong; Gardella, Joseph A.; Yatzor, Brett

GEOCHIMICA ET COSMOCHIMICA ACTA; JUN 2010, 74 12, pA602-pA602, 1p. Supplement: 1

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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