학술논문
'학술논문'
에서 검색결과 148건 | 목록
1~10
Academic Journal
In Journal of Computational and Applied Mathematics June 2017 317:403-431
Conference
Neisser, Mark; Levinson, Harry J.; Wurm, Stefan; Kyser, David; Watanabe, Takeo; Macwilliams, Ken; Ishiuchi, Hidemi; Trybula, Walt; Hayashi, Naoya; Fedynyshyn, Ted; Higgins, Craig; Nakamura, Tsuyoshi; Resnick, Doug; Preil, Moshe; Lercel, Michael; Aoyama, Hajime; Hosler, Erik
2021 IEEE International Roadmap for Devices and Systems Outbriefs IRDS Roadmap for Devices and Systems Outbriefs, 2021 IEEE International. :1-11 Nov, 2021
Academic Journal
Naulleau, Patrick P.; Anderson, Christopher N.; Chiu, Jerrin; Denham, Paul; George, Simi; Goldberg, Kenneth A.; Goldstein, Michael; Hoef, Brian; Hudyma, Russ; Jones, Gideon; Koh, Chawon; Fontaine, Bruno La; Ma, Andy; Montgomery, Warren; Niakoula, Dimitra; Park, Joo-on; Wallow, Tom; Wurm, Stefan
In Microelectronic Engineering 2009 86(4):448-455
Conference
Malloy, Matt; Bunday, Benjamin; Wurm, Stefan; Thiel, Brad; Kemen, Thomas; Zeidler, Dirk; Eberle, Anna Lena; Garbowski, Tomasz; Dellemann, Gregor; Peters, Jan Hendrik
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI. :266-271 May, 2015
Conference
Conference: SPIE - Extreme Ultraviolet (EUV) Lithography V, San Jose, CA, February 23, 2014; Other Information: Journal Publication Date: 90481M
Conference
Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) VLSI Technology, Systems and Application (VLSI-TSA), Proceedings of Technical Program - 2014 International Symposium on. :1-2 Apr, 2014
Conference
2007 Digest of papers Microprocesses and Nanotechnology Microprocesses and Nanotechnology, 2007 Digest of papers. :428-429 Nov, 2007
Conference
Conference: SPIE Advanced Lithography 2009, San Jose, CA, February 23-27, 2009; Other Information: Journal Publication Date: April 2009
Conference
Conference: EIPBN 2008, Portland, OR, May 27-30, 2008
Conference
Conference: SPIE BACUS, Monterey, CA, 10/07-10/10/08
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[AR] Wurm, Stefan
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