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A CMP Process for Hybrid Bonding Application with Conventional / nt-Cu and SixNy / SixOy Dielectrics
Conference
2024 IEEE 74th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2024 IEEE 74th. :2058-2061 May, 2024
Conference
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2022 IEEE 72nd. :1271-1276 May, 2022
Conference
Arata, Shogo; Noda, Chiaki; Ichige, Yasuhiro; Nomura, Satoyuki; Widodo, T. S.; Tsunoda, N.; Brun, X. F.
2022 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2022 IEEE International. :87-89 Jun, 2022
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제한된 항목
[AR] Widodo, T. S.
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