학술논문
'학술논문'
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1~10
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Conference
Wallow, Thomas I.; Pierson, Bill; Mizuno, Hiroyuki; Fumar-Pici, Anita; Petrillo, Karen; Anderson, Chris N.; Naulleau, Patrick P.; Hansen, Steven G.; Deng, Yunfei; van Ingen Schenau, Koen; Koay, Chiew-Seng; Ohara, Linda; Han, Sang-In; Watso, Robert; Huli, Lior; Burkhardt, Martin; Wood, Obert; Mallmann, Joerg; Kessels, Bart; Routh, Robert
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Conference
Cummings, Kevin D.; Laursen, Thomas; Pierson, Bill; Han, Sang-in; Watso, Robert; van Dommelen, Youri; Lee, Brian; Deng, Yunfei; La Fontaine, Bruno; Wallow, Thomas; Okoroanyanwu, Uzo; Wood, Obert; Tchikoulaeva, Anna; Holfeld, Christian; Peters, Jan Hendrick; Koay, Chiew-seng; Petrillo, Karen; DiBiase, Tony; Kini, Sumanth; Mizuno, Hiroyuki
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71222G-71222G-13, 13p
Conference
Brandl, Stefan; Watso, Robert; Pierson, Bill; Holmes, Steve; Wei, Yayi; Petrillo, Karen; Cummings, Kevin; Goodwin, Frank
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61540T-61540T-9, 9p
Conference
Wells, Greg; Hermans, Jan; Watso, Robert; Kang, Young-Seog; Morton, Robert; Kocsis, Michael K.; Okoroanyanwu, Uzodinma; De Bisschop, Peter; Stepanenko, Nickolay; Ronse, Kurt G.
Proceedings of SPIE; Nov2004, Issue 1, p91-98, 8p
Academic Journal
Kim, Ryoung-han; Watso, Robert; van Dommelen, Youri; Finders, Jo; Colburn, Matthew E.; Levinson, Harry J.
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2012, Vol. 30 Issue 2, p021602, 8p
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[AR] Watso, Robert
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