학술논문
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1~10
Academic Journal
In Applied Surface Science 2006 253(1):167-172
Conference
Arnaud, F.; Duriez, B.; Tavel, B.; Pain, L.; Todeschini, J.; Jurdit, M.; Laplanche, Y.; Boeuf, F.; Salvetti, F.; Lenoble, D.; Reynard, J.P.; Wacquant, F.; Morin, P.; Emonet, N.; Barge, D.; Bidaud, M.; Ceccarelli, D.; Vannier, P.; Loquet, Y.; Leninger, H.; Judong, F.; Perrot, C.; Guilmeau, I.; Palla, R.; Beverina, A.; DeJonghe, V.; Broekaart, M.; Vachellerie, V.; Bianchi, R.A.; Borot, B.; Devoivre, T.; Bicais, N.; Roy, D.; Denais, M.; Rochereau, K.; Difrenza, R.; Planes, N.; Brut, H.; Vishnobulta, L.; Reber, D.; Stolk, P.; Woo, M.
Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. VLSI technology VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on. :10-11 2004
Conference
Arnaud, F.; Boeuf, F.; Salvetti, F.; Lenoble, D.; Wacquant, F.; Regnier, C.; Morin, P.; Emonet, N.; Denis, E.; Oberlin, J.C.; Ceccarelli, D.; Vannier, P.; Imbert, G.; Sicard, A.; Perrot, C.; Belmont, O.; Guilmeau, I.; Sassoulas, P.O.; Delmedico, S.; Palla, R.; Leverd, F.; Beverina, A.; DeJonghe, V.; Broekaart, M.; Pain, L.; Todeschini, J.; Charpin, M.; Laplanche, Y.; Neira, D.; Vachellerie, V.; Borot, B.; Devoivre, T.; Bicais, N.; Hinschberger, B.; Pantel, R.; Revil, N.; Parthasarathy, C.; Planes, N.; Brut, H.; Farkas, J.; Uginet, J.; Stolk, P.; Woo, M.
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) VLSI technology VLSI Technology, 2003. Digest of Technical Papers. 2003 Symposium on. :65-66 2003
Conference
Vachellerie, V.; Kremer, S.; Elazami, A.; Morin, P.; Julien, C.; Duca, D.; Guiheux, D.; Bicais, N.; Pokrant, S.
Academic Journal
Vachellerie, V.; Ristoiu, D.; Deleporte, A.; Poulingue, M.; Bedin, Y.; Arendt, R.; Sundaram, G.; Knutrud, P.
In: Proceedings of SPIE-The International Society for Optical Engineering . (Proceedings of SPIE-The International Society for Optical Engineering, 2002, 4689 I:531-540)
Academic Journal
Vachellerie, V.; Ristoiu, D.; Deleporte, A.; Sassoulas, P.-O.; Spinelli, P.; Poulingue, M.; Fabre, P.; Arendt, R.; Sundaram, G.; Knutrud, P.
In: Proceedings of SPIE-The International Society for Optical Engineering . (Proceedings of SPIE-The International Society for Optical Engineering, 2002, 4689 I:223-236)
Academic Journal
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 5, p2249-2253, 5p
Conference
In: AIP Conference Proceedings , CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005 - International Conference. (AIP Conference Proceedings, 9 September 2005, 788:451-454)
Conference
Lecarpentier, L.; Vachellerie, V.; Feneyrou, A.; Guillot, S.; Thony, P.; Kassel, E.; Avrahamov, Y.; Huang, C.-C.K.; Felten, F.; Polli, M.
In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE , Metrology, Inspection, and Process Control for Microlithography XIX. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 2005, 5752(III):1413-1423)
Conference
Guilmeau, I.; Vachellerie, V.; Lenoble, D.; Nogueira, P.; Mougel, S.; Chapon, J.-D.; Guerrero, A.F.; Blain, V.; Kremer, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Resist Technology and Processing XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5376(PART 1):461-470)
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[AR] Vachellerie, V.
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