학술논문
'학술논문'
에서 검색결과 43건 | 목록
1~10
Conference
Lu, Y.-F.; Li, C.-S.; Tsai, K.-T.; Tsou, C.-J.; Bald, H.; Hille, S.; Freitag, M.; Utzny, C.; Habets, B.; Demirer, O.; Eitapence, S.; Li, M.-S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
Lopez-Gomez, A.; Buhl, S.; Jehnes, E.; Lomtscher, P.; Gutsch, M.; Thrun, X.; Utzny, C.; Groeger, P.; Kowalewski, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
Demirer, O.; Eitapence, S.; Zech, R.M.; Tsou, C.-J.; Muehle, A.; Bald, H.; Utzny, C.; Habets, B.; Chiu, A.; Wang, W.H.; Huang, C.H.; Yang, E.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Conference
Mohammad, S.N.; Tsou, C.-J.; Birnstein, N.; deGouw, E.; Utzny, C.; Groeger, P.; Buhl, S.; Chiu, A.; Wang, W.H.; Huang, C.H.; Yang, E.; Yang, T.H.; Chen, K.C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Conference
Chiu, C.-C.; Tian, F.; Feng, W.; Gao, M.; Lan, A.; Tsou, C.-J.; Zhong, S.; Birnstein, N.; Zech, R.M.; Utzny, C.; Zhu, J.; Pei, J.; Huang, K.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12053)
Conference
Proceedings of SPIE; Nov2007, Issue 1, p660729-660729-7, 7p
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제한된 항목
[AR] Utzny, C.
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