학술논문
'학술논문'
에서 검색결과 61건 | 목록
1~10
Periodical
Kim, Ryoung-Han; Lafferty, Neal V.; Lafferty, Neal; Saxena, Sagar; Mizuuchi, Keisuke; Ma, Yuansheng; Zhang, Xima; LaCour, Pat; Tritchkov, Alexander; Kmiec, Farah; Sturtevant, John
Proceedings of SPIE; April 2023, Vol. 12495 Issue: 1 p124950K-124950K-15, 12370066p
Periodical
Renwick, Stephen P.; Ma, Yuansheng; Wu, Rui; Lei, Junjiang; Mizuuchi, Keisuke; Tritchkov, Alexander; Jiang, Fan; Hong, Dingyi; Ali, Rehab; Hong, Le; Sun, Yuyang
Proceedings of SPIE; October 2021, Vol. 11855 Issue: 1 p118550T-118550T-10, 11736461p
Periodical
Renwick, Stephen P.; Liubich, Vlad; Mizuuchi, Keisuke; Tritchkov, Alexander; Rathi, Ashutosh; Zhang, Xima; Kim, Isabella; Sturtevant, John
Proceedings of SPIE; October 2021, Vol. 11855 Issue: 1 p118550S-118550S-9, 1066960p
Implementation of different cost functions for EUV mask optimization for next generation beyond 7nm.
Conference
Proceedings of SPIE; 1/20/2019, Vol. 10957, p1095712-1-1095712-8, 8p
Periodical
Owa, Soichi; Phillips, Mark C.; Gharat, Sayalee; Durvasula, Bhardwaj; Pai, Ravi; Buck, Peter; Koranne, Sandeep; Tritchkov, Alexander
Proceedings of SPIE; March 2021, Vol. 11613 Issue: 1 p116130B-116130B-10, 11496881p
Periodical
Proceedings of SPIE; March 2021, Vol. 11613 Issue: 1 p116130M-116130M-7, 1045178p
Periodical
Preil, Moshe E.; Renwick, Stephen P.; Bork, Ingo; Tritchkov, Alexander; Shang, Shumay; Levine, Evgueni; Zuo, Mary
Proceedings of SPIE; October 2020, Vol. 11518 Issue: 1 p115180R-115180R-8, 1036629p
Conference
Vivian Wei Guo; Fan Jiang; Rankin, Jed; Bork, Ingo; Tritchkov, Alexander; Wei, Alexander; Yuyang Sun; Jayaram, Srividya; Larry Zhuang; Xima Zhang; Bailey, Todd; Word, James
Proceedings of SPIE; 8/26/2018, Vol. 10810, p108100P-1-108100P-13, 13p
Conference
Proceedings of SPIE; 1/15/2018, Vol. 10587, p1-10, 10p
Conference
Proceedings of SPIE; 1/15/2018, Vol. 10587, p1-7, 7p
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[AR] Tritchkov, Alexander
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