학술논문
'학술논문'
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Academic Journal
Matsuyama, Shigeo; Miwa, Misako; Kada, Wataru; Kitayama, Yoshiharu; Toyama, Sho; Kikuchi, Yohei; Numao, Kazuya; Takai, Yuta; Sato, Yuta; Seki, Daiki; Kasahara, Kazuto
In Nuclear Inst. and Methods in Physics Research, B 1 June 2021 496:1-8
Conference
2023 International Conference on Photonics in Switching and Computing (PSC) Photonics in Switching and Computing (PSC), 2023 International Conference on. :1-3 Sep, 2023
Periodical
Proceedings of SPIE; March 2024, Vol. 12891 Issue: 1 p128910F-128910F-7, 1160198p
Academic Journal
In Thin Solid Films 2008 516(5):572-575
Academic Journal
In Thin Solid Films 2008 516(5):641-643
Academic Journal
Saitoh, Katsumi; Matsuyama, Shigeo; Takai, Yuta; Miwa, Misako; Toyama, Sho; Kikuchi, Yohei; Nakazawa, Koyomi; Nagafuchi, Osamu
Academic Journal
Thin Solid Films. Jan 15, 2008, Vol. 516 Issue 5, p641, 3 p.
Properties of hetero-structured SiC X films deposited by hot-wire CVD using SiH3 CH3 as carbon source
Academic Journal
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[AR] Takai, Yuta
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