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발행년	- (예 : 2010-2015)

Understanding and improving performance of 14-nm HP EUV lithography via rational design of materials

Periodical

Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Sweat, Daniel; Lu, Xinlin; Brakensiek, Kelsey; Lu, Pengtao; Lowes, Joyce; Van Driessche, Veerle; Guerrero, Douglas J.

Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571T-129571T-8, 1166148p

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Functional underlayers, surface priming, and multilayer stacks to improve dose and adhesion of EUV photoresists

Periodical

Guerrero, Douglas; Amblard, Gilles R.; Fallica, Roberto; Verstraete, Lander; Huang, Weizhong; Gupta, Mihir; De Simone, Danilo; Li, Si (Elly); Sweat, Daniel; Guerrero, Douglas J.; Kato, Kodai

Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p1295712-1295712-3

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Lithography performance improvement of MOR by underlayers

Periodical

Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Lu, Xinlin; Grannemann, Stephen; Sweat, Daniel; Brakensiek, Kelsey; Lu, Pengtao; Lowes, Joyce; Krishnamurthy, Vandana; Van Driessche, Veerle; Guerrero, Douglas J.

Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p1295715-1295715-13

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Optimized plasma etch window of block copolymers and neutral brush layers for enhanced direct self-assembly pattern transfer into a hardmask layer.

Conference

Brakensiek, Nickolas; Kui Xu; Sweat, Daniel; Hockey, Mary Ann

Proceedings of SPIE; 1/17/2018, Vol. 10589, p105890S-1-105890S-7, 7p, 6 Charts, 4 Graphs

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Optimized plasma etch window of block copolymers and neutral brush layers for enhanced direct self-assembly pattern transfer into a hardmask layer

Periodical

Engelmann, Sebastian U.; Wise, Richard S.; Brakensiek, Nickolas; Xu, Kui; Sweat, Daniel; Hockey, Mary Ann

Proceedings of SPIE; April 2018, Vol. 10589 Issue: 1 p105890S-105890S-7, 953018p

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Highχblock copolymers for directed self-assembly patterning without the need for topcoat or solvent annealing

Periodical

Hohle, Christoph K.; Gronheid, Roel; Xu, Kui; Hockey, Mary Ann; Calderas, Eric; Guerrero, Douglas; Sweat, Daniel; Fiehler, Jeffrey

Proceedings of SPIE; March 2017, Vol. 10146 Issue: 1 p101460U-101460U-7, 913148p

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A Spray-Processable, Low Bandgap, and Ambipolar Donor--Acceptor Conjugated Polymer.

Academic Journal

Steckler, Timothy T.; Xuan Zhang; Jungseek Hwang; Honeyager, Ryan; Ohira, Shino; Xiao-Hong Zhang; Grant, Adrian; Ellinger, Stefan; Odom, Susan A.; Sweat, Daniel; Tanner, David B.; Rinzler, Andrew G.; Barlow, Stephen; Brédas, Jean-Luc; Kippelen, Bernard; Marder, Seth R.; Reynolds, John R.

Journal of the American Chemical Society. 3/4/2009, Vol. 131 Issue 8, p2824-2826. 3p. 3 Graphs.

Full Text (ACS) Web of Science JCR 저널정보 Scopus Find it@PNU

Single component inimer containing cross-linkable ultrathin polymer coating for dense polymer brush growth

Academic Journal

Gopalan, Padma; Sweat, Daniel; Kim, Myungwoong; Yu, Xiang

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY; SEP 8 2013, 246 1p.

Web of Science Find it@PNU

Single molecule electron transfer at a probe tip: Switching the charge state of discrete organic quantum wells in polymer thin films

Academic Journal

Blackstock, Silas C.; Chotsuwan, Chuleekorn; Kim, Kye-Young; Sweat, Daniel; Gray, Lester

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY; MAR 21 2010, 239 1p.

Web of Science Find it@PNU

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