학술논문
'학술논문'
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1~10
BEOL Interconnect Innovation: Materials, Process and Systems Co-optimization for 3nm Node and Beyond
Conference
Thareja, G.; Pal, A.; Wang, X.; Dag, S.; You, S.; Sharma, S.; Zhu, Q.; Cervantes, C.L.; Hwang, S.; Spuller, M.; Ng, B.; Kumar, P.S.; Tam, N.; Gage, M.; Deshpande, S.; Wu, Z.; Jansen, A.; Dey, L.; Chen, F.; Xie, X.; Kashefizadeh, K.; Reddy, V.; Lo, A.; Chen, Z.; Huey, S.; Tang, J.; Ren, H.; Naik, M.; Brown, B.; Kesapragada, S.; Ayyagari-Sangamali, B.; Bazizi, E.M.; Tang, X.
In: Digest of Technical Papers - Symposium on VLSI Technology , 2023 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2023. (Digest of Technical Papers - Symposium on VLSI Technology, 2023, 2023-June)
Academic Journal
In: Materials . (Materials, 30 July 2018, 11(8))
Academic Journal
In: Journal of the Electrochemical Society . (Journal of the Electrochemical Society, April 2006, 153(4):G314-G318)
Conference
Interconnect Technology Conference (IITC), 2010 International; 2010, p1-3, 3p
Periodical
Bhatnagar, A.; Naik, M.; Ramaswami, S.; Spuller, M.; Armacost, M.; Perry, R.; Van Gogh, J.; Shu, J.; Miner, G.
In: Solid State Technology . (Solid State Technology, October 2009, 52(10):16-19)
Conference
In: 2010 IEEE International Interconnect Technology Conference, IITC 2010 , 2010 IEEE International Interconnect Technology Conference, IITC 2010. (2010 IEEE International Interconnect Technology Conference, IITC 2010, 2010)
Conference
In: ECS Transactions , Student Posters (General). (ECS Transactions, 2006, 1(23):17-24)
검색 결과 제한하기
제한된 항목
[AR] Spuller, M.
발행연도 제한
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