학술논문
'학술논문'
에서 검색결과 45건 | 목록
1~10
Academic Journal
Schelcher, G.; De Poortere, E.P.; Kissoon, N.; Paolillo, S.; Silva, M.d.A.C.e.; Zhang, Y.; Tabery, C.; Mulkens, J.; McManus, M.; Leray, P.; Halder, S.
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 35(3):478-484 Aug, 2022
Academic Journal
In Microelectronic Engineering November 2013 111:39-44
Academic Journal
In: Journal of Korean Institute of Communications and Information Sciences . (Journal of Korean Institute of Communications and Information Sciences, Jan 2023, 48(1):47-54)
Conference
Schelcher, G.; Schoofs, S.; Tamaddon, A.-H.; Blanco, V.; Leray, P.; Athayde, M.; Hsia, J.; Khalik, Z.; Li, F.; Nechaev, K.; Sahraeian, R.; van der Sanden, S.; Zhang, Y.; Anunciado, R.; Dillen, H.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Academic Journal
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 20(5):1184-1191 Oct, 2011
Academic Journal
Da Silva, B.; Zhang, M.; Schelcher, G.; Winter, L.; Guyon, C.; Tatoulian, M.; Bonn, D.; Tabeling, P.
In: Plasma Processes and Polymers . (Plasma Processes and Polymers, 1 March 2017, 14(3))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2022. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12292)
Academic Journal
In: Plasma Processes and Polymers . (Plasma Processes and Polymers, 1 September 2016, 13(9):869-878)
Academic Journal
Da Silva, B.; Ognier, S.; Schelcher, G.; Tatoulian, M.; Bonn, D.; Habibi, M.; Mostafavi-Amjad, J.; Khalesifard, H.R.M.
In: European Physical Journal: Special Topics . (European Physical Journal: Special Topics, 1 July 2016, 225(4):707-714)
Academic Journal
Schelcher, G.; Guyon, C.; Ognier, S.; Cavadias, S.; Martinez, E.; Tatoulian, M.; Taniga, V.; Malaquin, L.; Tabeling, P.
In: Lab on a Chip . (Lab on a Chip, 21 August 2014, 14(16):3037-3042)
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[AR] Schelcher, G.
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