학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 45건 | 목록 1~10
Academic Journal
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 35(3):478-484 Aug, 2022
Academic Journal
In: Journal of Korean Institute of Communications and Information Sciences. (Journal of Korean Institute of Communications and Information Sciences, Jan 2023, 48(1):47-54)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Academic Journal
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 20(5):1184-1191 Oct, 2011
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, International Conference on Extreme Ultraviolet Lithography 2022. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12292)
Academic Journal
In: Plasma Processes and Polymers. (Plasma Processes and Polymers, 1 September 2016, 13(9):869-878)
Academic Journal
In: European Physical Journal: Special Topics. (European Physical Journal: Special Topics, 1 July 2016, 225(4):707-714)
Academic Journal
In: Lab on a Chip. (Lab on a Chip, 21 August 2014, 14(16):3037-3042)
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제한된 항목
[AR] Schelcher, G.
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