학술논문
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Academic Journal
Albrecht, M.; Kim, T.J.; Larina, O.V.; Mebrahtu, C.; Melander, M.; Ortuño, M.A.; Puurunen, R.; Shishido, T.; Szaleniec, M.; Wang, S.
In: Catalysis Science and Technology . (Catalysis Science and Technology, 28 June 2024, 14(14):3819)
Conference
De Gendt, S.; Chen, J.; Carter, R.; Cartier, E.; Caymax, M.; Claes, M.; Conard, T.; Delabie, A.; Deweerd, W.; Kaushik, V.; Kerber, A.; Kubicek, S.; Maes, J.W.; Niwa, M.; Pantisano, L.; Puurunen, R.; Ragnarsson, L.; Schram, T.; Shimamoto, Y.; Tsai, W.; Rohr, E.; Van Elshocht, S.; Witters, T.; Young, E.; Zhao, C.; Heyns, M.
Extended Abstracts of International Workshop on Gate Insulator (IEEE Cat. No.03EX765) Gate insulator Gate Insulator, 2003. IWGI 2003. Extended Abstracts of International Workshop on. :10-14 2003
Academic Journal
In: Topics in Catalysis . (Topics in Catalysis, October 2023, 66(17-18):1285-1286)
Book
Kiihamäki, J.; Kattelus, H.; Blomberg, M.; Puurunen, R.; Laamanen, M.; Pekko, P.; Saarilahti, J.; Ritala, H.; Rissanen, A.
In: Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators . (NATO Science for Peace and Security Series B: Physics and Biophysics, 2010, :167-178)
Conference
2010 IEEE Sensors; 2010, p767-770, 4p
Electronic Resource
Ahvenniemi, E.; Akbashev, A.R.; Ali, S.; Bechelany, M.; Berdova, M.; Boyadjiev, S.; Cameron, D.C.; Chen, R.; Chubarov, M.; Cremers, V.; Devi, A.; Drozd, V.; Elnikova, L.; Gottardi, G.; Grigoras, K.; Hausmann, D.M.; Hwang, C.S.; Jen, S.H.; Kallio, T.; Kanervo, J.; Khmelnitskiy, I.; Kim, D.H.; Klibanov, L.; Koshtyal, Y.; Krause, A. Outi I; Kuhs, J.; Kärkkänen, I.; Kääriäinen, M.L.; Kääriäinen, T.; Lamagna, L.; Łapicki, A.A.; Leskelä, M.; Lipsanen, H.; Lyytinen, J.; Malkov, A.; Malygin, A.; Mennad, A.; Militzer, C.; Molarius, J.; Norek, M.; Özgit-Akgün, Ç.; Panov, M.; Pedersen, H.; Piallat, F.; Popov, G.; Puurunen, R.; Rampelberg, G.; Ras, R.H.A.; Rauwel, E.; Roozeboom, F.; Sajavaara, T.; Salami, H.; Savin, H.; Schneider, N.; Seidel, T.E.; Sundqvist, J.; Suyatin, D.B.; Törndahl, T.; van Ommen, J.R.; Wiemer, C.; Ylivaara, O.M.E.; Yurkevich, O.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films vol.35 (2017) date: 2017-01-01 nr.1 p.1-13 [ISSN 0734-2101]
Book
Van Elshocht, S.; Delabie, A.; Brijs, B.; Caymax, M.; Conard, T.; Onsia, B.; Puurunen, R.; Richard, O.; Van Steenbergen, J.; Zhao, C.; Meuris, M.; Heyns, M.M.
In: Ultra Clean Processing of Silicon Surfaces VII, UCPSS 2004 - Proceedings of the 7th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS) . (Solid State Phenomena, 2005, 103-104:31-34)
Conference
De Gendt, S.; Beckx, S.; Caymax, M.; Claes, M.; Conard, T.; Delabie, A.; Deweerd, W.; Hellin, D.; Onsia, B.; Parashiv, V.; Puurunen, R.; Rohr, E.; Snow, J.; Van Doorne, P.; Van Elshocht, S.; Witters, T.; Heyns, M.; Kraus, H.; Tsai, W.; Vertommen, J.
In: Proceedings - Electrochemical Society , Cleaning Technology in Semiconductor Device Manufacturing VIII - Proceedings of the International Symposium. (Proceedings - Electrochemical Society, 2003, 26:67-77)
Conference
De Gendt, S.; Caymax, M.; Claes, M.; Conard, T.; Delabie, A.; Deweerd, W.; Kubicek, S.; Pantisano, L.; Puurunen, R.; Ragnarsson, L.; Schram, T.; Rohr, E.; Van Elshocht, S.; Vandervorst, W.; Witters, T.; Zhao, C.; Heyns, M.; Chen, J.; Kaushik, V.; Kerber, A.; Tsai, W.; Young, E.; Niwa, M.; Shimamoto, Y.
In: Proceedings - Electrochemical Society , Physics and Technology of High-k Gate Dielectrics II - Proceedings of the Int. Symp. on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues. (Proceedings - Electrochemical Society, 2003, 22:267-275)
Conference
In: TMS Annual Meeting , Sulfide Smelting 2002. (TMS Annual Meeting, 2002, :283-293)
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제한된 항목
[AR] Puurunen, R.
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