학술논문
'학술논문'
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1~10
Conference
2017 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) Young Researchers in Electrical and Electronic Engineering (EIConRus), 2017 IEEE Conference of Russian. :1449-1451 2017
Conference
Vertyanov, D.; Timoshenkov, S.; Golishnikov, A.; Nazarov, E.; Putrya, M.; Korobova, N.; Kostyukov, D.
2014 IEEE 34th International Scientific Conference on Electronics and Nanotechnology (ELNANO) Electronics and Nanotechnology (ELNANO), 2014 IEEE 34th International Conference on. :54-57 Apr, 2014
Conference
In: Proceedings of the Seminar on Microelectronics, Dielectrics and Plasmas, Theory and Practical Applications, MDP 2023 , Proceedings of the Seminar on Microelectronics, Dielectrics and Plasmas, Theory and Practical Applications, MDP 2023. (Proceedings of the Seminar on Microelectronics, Dielectrics and Plasmas, Theory and Practical Applications, MDP 2023, 2023, :75-81)
Academic Journal
Academic Journal
Conference
In: Proceedings of the 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2019 , Proceedings of the 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2019. (Proceedings of the 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2019, 28 February 2019, :2083-2086)
Research and development of deep anisotropic plasma silicon etching process to form MEMS structures.
Academic Journal
Academic Journal
Academic Journal
Radiophysics & Quantum Electronics; 1989, Vol. 32 Issue 9, p862-868, 7p
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제한된 항목
[AR] Putrya, M.
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