학술논문
'학술논문'
에서 검색결과 43건 | 목록
1~10
Academic Journal
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 July 2023, 41(4))
Academic Journal
Panneerchelvam, P.; Huard, C.M.; Pret, A.V.; Agarwal, A.; Mani, A.; Gronheid, R.; Demand, M.; Kumar, K.; Paolillo, S.; Lazzarino, F.
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 December 2022, 40(6))
Conference
Poliakov, P.; Blomme, P.; Pret, A.V.; Corbalan, M.M.; Gronheid, R.; Wiaux, V.; Versluijs, J.; Verkest, D.; Van Houdt, J.; Dehaene, W.
2012 4th IEEE International Memory Workshop Memory Workshop (IMW), 2012 4th IEEE International. :1-4 May, 2012
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 July 2021, 20(3))
Conference
Kim, E.; Kim, W.; Lee, J.; Kim, S.; Lee, S.; Kwak, N.; Kang, M.; Jeong, Y.; Hwang, M.; Park, C.; Koo, K.; Jeong, S.; Biafore, J.; Smith, M.; Graves, T.; Burov, A.; Vukkadala, P.; Parsey, G.; Zhang, C.; Bai, K.; Krek, J.; Higgins, C.; Bakarian, S.; Ko, K.; Gronheid, R.; Sah, K.; Cross, A.; Liu, Y.; Pret, A.V.; Walker, C.; Tolani, V.; Hwa, G.; Hu, P.; Chang Song; Arkhipov, A.; Bouckou, L.; Liu, C.-P.; Yang, X.; O Hara, K.; Son, D.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Academic Journal
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, April-June 2017, 16(2))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2022. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12293)
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제한된 항목
[AR] Prêt, A.V.
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