학술논문
'학술논문'
에서 검색결과 28건 | 목록
1~10
Conference
Subramany, Lokesh; Chung, Woong Jae; Gutjhar, Karsten; Garcia-Medina, Miguel; Sparka, Christian; Yap, Lipkong; Demirer, Onur; Karur-Shanmugam, Ramkumar; Riggs, Brent; Ramanathan, Vidya; Robinson, John C.; Pierson, Bill
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI. :324-328 May, 2015
Periodical
Ramey, Eric C.; Pierson, Bill; Heier, Rosemary; Jowdy, Larry; Dempster, Kris; Gannaway, Cheryl; Chamberlain, Tony; Davis, Emily; Bunger, Dave; Rapley, David
Motorhome. February, 2020, Vol. 57 Issue 2, p10, 2 p.
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Conference
Wallow, Thomas I.; Pierson, Bill; Mizuno, Hiroyuki; Fumar-Pici, Anita; Petrillo, Karen; Anderson, Chris N.; Naulleau, Patrick P.; Hansen, Steven G.; Deng, Yunfei; van Ingen Schenau, Koen; Koay, Chiew-Seng; Ohara, Linda; Han, Sang-In; Watso, Robert; Huli, Lior; Burkhardt, Martin; Wood, Obert; Mallmann, Joerg; Kessels, Bart; Routh, Robert
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Conference
Meiling, Hans; Buzing, Nico; Cummings, Kevin; Harned, Noreen; Hultermans, Bas; de Jonge, Roel; Kessels, Bart; Kürz, Peter; Lok, Sjoerd; Lowisch, Martin; Mallman, Joerg; Pierson, Bill; Wagner, Christian; van Dijk, Andre; van Setten, Eelco; Zimmerman, John
Proceedings of SPIE; Nov2009, Issue 1, p727102-727102-15, 15p
Conference
Koh, Chawon; Ren, Liping; Georger, Jacque; Goodwin, Frank; Wurm, Stefan; Pierson, Bill; Park, Joo-On; Wallow, Tom; Younkin, Todd R.; Naulleau, Patrick
Proceedings of SPIE; Nov2009, Issue 1, p727124-727124-11, 11p
Conference
Meiling, Hans; Buzing, Nico; Cummings, Kevin; Harned, Noreen; Hultermans, Bas; De Jonge, Roel; Kessels, Bart; Kürz, Peter; Lok, Sjoerd; Lowisch, Martin; Mallman, Joerg; Pierson, Bill; Wagner, Christian; Van Dijk, Andre; Van Setten, Eelco; Zimmerman, John; Cheang, Peter; Chen, Alek
Proceedings of SPIE; Nov2009, Issue 1, p752008-752008-13, 13p
Conference
Yamada, Yoshiaki; Crouse, Michael M.; Dunn, Shannon; Kawasaki, Tetsu; Shimura, Satoru; Nishimura, Eiichi; Tanaka, Yoshitsugu; Galloway, Judy; Pierson, Bill; Routh, Robert
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69242D-69242D-11, 11p
Conference
Cummings, Kevin D.; Laursen, Thomas; Pierson, Bill; Han, Sang-in; Watso, Robert; van Dommelen, Youri; Lee, Brian; Deng, Yunfei; La Fontaine, Bruno; Wallow, Thomas; Okoroanyanwu, Uzo; Wood, Obert; Tchikoulaeva, Anna; Holfeld, Christian; Peters, Jan Hendrick; Koay, Chiew-seng; Petrillo, Karen; DiBiase, Tony; Kini, Sumanth; Mizuno, Hiroyuki
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71222G-71222G-13, 13p
Conference
Meiling, Hans; Boon, Edwin; Buzing, Nico; Cummings, Kevin; Frijns, Olav; Galloway, Judy; Goethals, Mieke; Harned, Noreen; Hultermans, Bas; de Jonge, Roel; Kessels, Bart; Kürz, Peter; Lok, Sjoerd; Lowisch, Martin; Mallman, Joerg; Pierson, Bill; Ronse, Kurt; Ryan, James; Smitt-Weaver, Emil; Tittnich, Michael
Proceedings of SPIE; Nov2008, Issue 1, p69210L-69210L-13, 13p
Conference
Proceedings of SPIE; Nov2008, Issue 1, p692314-692314-12, 12p
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[AR] Pierson, Bill
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