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Pawloski, Adam R.; McGall, Glenn; Kuimelis, Robert G.; Barone, Dale; Cuppoletti, Andrea; Ciccolella, Paul; Spence, Eric; Afroz, Farhana; Bury, Paul; Chen, Christy; Chuan Chen; Pao, Dexter; Le, Mary; McGee, Becky; Harkins, Elizabeth; Savage, Michael; Narasimhan, Sim; Goldberg, Martin; Rava, Richard; Fodor, Stephen P. A.
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Nov/Dec2007, Vol. 25 Issue 6, p2537-2546, 10p, 4 Diagrams, 9 Graphs
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[AR] Pao, Dexter
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