학술논문
'학술논문'
에서 검색결과 45건 | 목록
1~10
Academic Journal
Frickinger, J.; Oechsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claeys, C.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S.
In IFAC Proceedings Volumes 2006 39(3):59-64
Conference
2012 SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI. :365-370 May, 2012
Conference
2010 International Symposium on Semiconductor Manufacturing (ISSM) Semiconductor Manufacturing (ISSM), 2010 International Symposium on. :1-4 Oct, 2010
Conference
1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) Semiconductor manufacturing Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on. :P41-P44 1997
Academic Journal
Oechsner, R.; Pfeffer, M.; Frickinger, J.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S.
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 20(3):215-221 Aug, 2007
Conference
Oechsner, R.; Frickinger, J.; Pfeffer, M.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S.
2006 IEEE International Symposium on Semiconductor Manufacturing Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on. :487-490 Sep, 2006
Academic Journal
Rochlitz, L.; Bayler, A.; Steinberger, M.; Oechsner, R.; Weber, A.; Schmitz, S.; Schillinger, K.; Wolff, M.
In: International Journal of Hydrogen Energy . (International Journal of Hydrogen Energy, 21 June 2019, 44(31):17168-17184)
Academic Journal
In: Applied Energy . (Applied Energy, 15 December 2018, 232:572-582)
Academic Journal
Academic Journal
In: Microelectronic Engineering . (Microelectronic Engineering, July 1999, 45(2):247-256)
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제한된 항목
[AR] Oechsner, R.
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