학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 6건 | 목록 1~10
Conference
2007 IEEE International Electron Devices Meeting Electron Devices Meeting, 2007. IEDM 2007. IEEE International. :31-34 Dec, 2007
Academic Journal
In: Applied Physics Letters. (Applied Physics Letters, 27 March 2000, 76(13):1749-1751)
Conference
In: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2018, 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2018. (2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2018, 5 June 2018, :244-248)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Design-Process-Technology Co-optimization for Manufacturability XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10148)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, 32nd European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 10032)
Periodical
Proceedings of SPIE; April 2017, Vol. 10148 Issue: 1 p1014812-1014812-7
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제한된 항목
[AR] Moll, H.-P.
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