학술논문
'학술논문'
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Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 January 2024, 23(1))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12055)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2021. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11854)
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제한된 항목
[AR] McAfee, T.R.
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