학술논문
'학술논문'
에서 검색결과 23건 | 목록
1~10
Conference
Zimmermann, Rainer; Schulz, Martin; Hoppe, Wolfgang; Stock, Hans-Jürgen; Demmerle, Wolfgang; Zepka, Alex; Isoyan, Artak; Bomholt, Lars; Manakli, Serdar; Pain, Laurent
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74883J-74883J-13, 13p
Conference
Pain, Laurent; Jurdit, M.; LaPlanche, Yves T.; Todeschini, J.; Manakli, Serdar; Bervin, G.; Palla, Ramiro; Beverina, A.; Faure, R.; Bossy, X.; Leininger, H.; Tourniol, S.; Broekaart, M.; Judong, F.; Brosselin, K.; Gouraud, P.; De Jonghe, Veronique; Henry, Daniel; Woo, M.; Stolk, Peter
Proceedings of SPIE; Nov2004, Issue 1, p590-600, 11p
Conference
Trouiller, Yorick; Belledent, Jerome; Chapon, J. D.; Rousset, V.; Rody, Yves F.; Manakli, Serdar; Goirand, Pierre-Jerome
Proceedings of SPIE; Nov2003, Issue 1, p1231-1240, 10p
Using the CODE technique to print complex two-dimensional structures in a 90-nm ground rule process.
Conference
Manakli, Serdar; Trouiller, Yorick; Toublan, Olivier; Schiavone, Patrick; Rody, Yves F.; Goirand, Pierre Jerome
Proceedings of SPIE; Nov2003, Issue 1, p205-213, 9p
Conference
Trouiller, Yorick; Serrand, J.; Miramond, Corinne; Rody, Yves F.; Manakli, Serdar; Goirand, Pierre-Jerome
Proceedings of SPIE; Nov2002, Issue 1, p1522-1529, 8p
Conference
Manakli, Serdar; Trouiller, Yorick; Toublan, Olivier; Schiavone, Patrick; Miramond, Corinne; Rody, Yves F.; Sundermann, Frank; Chapon, J. D.; Goirand, Pierre-Jerome
Proceedings of SPIE; Nov2002, Issue 1, p491-502, 12p
Conference
Manakli, Serdar; Trouiller, Yorick; Toublan, Olivier; Schiavone, Patrick; Rody, Yves F.; Goirand, Pierre Jerome
Proceedings of SPIE; Nov2002, Issue 1, p1181-1188, 8p
Academic Journal
Icard, Beatrice; Pain, Laurent; Arnal, V.; Manakli, Serdar; Le-Denmat, Jean-Christophe; Brun, P.; Vincent, Maxime; Soonkindt, Christophe; Minghetti, Blandine; Matsumiya, Tasuku
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jan/Feb2007, Vol. 25 Issue 1, p124-129, 6p, 4 Black and White Photographs, 6 Graphs
Academic Journal
Manakli, Serdar; Trouiller, Yorick; Toublan, Olivier; Schiavone, Patrick; Rody, Yves; Goirand, P. J.
Journal of Micro/Nanolithography, MEMS & MOEMS; Apr2004, Vol. 3 Issue 2, p305-315, 11p
Periodical
Martin, Luc; Manakli, Serdar; Bayle, Sebastien; Belledent, Jérôme; Soulan, Sebastien; Wiedemann, Pablo; Farah, Abdi; Schiavone, Patrick
Proceedings of SPIE; March 2012, Vol. 8323 Issue: 1 p83231W-83231W-10, 8239880p
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제한된 항목
[AR] Manakli, Serdar
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