학술논문
'학술논문'
에서 검색결과 13건 | 목록
1~10
Periodical
Burkhardt, Martin; van Lare, Claire; Santaclara, J. G.; Peeters, Rudy; van Ballegoij, Rob; Lok, Sjoerd; van Schoot, Jan; Graeupner, Paul; Kuerz, Peter; Mallmann, Joerg; Storms, Greet; Vanoppen, Peter
Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p129530P-129530P-7, 1165778p
Conference
Shigemori, Kazuhito; Wang, Suping; Tedeschi, Len; Tanriseven, Gazi; Maas, Raymond; Verspaget, Coen; Marechal, Ruud; Lammers, Ad; Mallmann, Joerg; Harumoto, Masahiko; Hisai, Akihiro; Asai, Masaya
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72732B-72732B-13, 13p
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Conference
Wallow, Thomas I.; Pierson, Bill; Mizuno, Hiroyuki; Fumar-Pici, Anita; Petrillo, Karen; Anderson, Chris N.; Naulleau, Patrick P.; Hansen, Steven G.; Deng, Yunfei; van Ingen Schenau, Koen; Koay, Chiew-Seng; Ohara, Linda; Han, Sang-In; Watso, Robert; Huli, Lior; Burkhardt, Martin; Wood, Obert; Mallmann, Joerg; Kessels, Bart; Routh, Robert
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Periodical
Panning, Eric M.; Goldberg, Kenneth A.; Pirati, Alberto; Peeters, Rudy; Smith, Daniel; Lok, Sjoerd; van Noordenburg, Martijn; van Es, Roderik; Verhoeven, Eric; Meijer, Henk; Minnaert, Arthur; van der Horst, Jan-Willem; Meiling, Hans; Mallmann, Joerg; Wagner, Christian; Stoeldraijer, Judon; Fisser, Geert; Finders, Jo; Zoldesi, Carmen; Stamm, Uwe; Boom, Herman; Brandt, David; Brown, Daniel; Fomenkov, Igor; Purvis, Michael
Proceedings of SPIE; March 2016, Vol. 9776 Issue: 1 p97760A-97760A-15, 9678256p
Conference
Felix, Nelson M.; Lio, Anna; Wischmeier, Lars; Graeupner, Paul; Kuerz, Peter; Kaiser, Winfried; van Schoot, Jan; Mallmann, Joerg; de Pee, Joost; Stoeldraijer, Judon
Proceedings of SPIE; 1/21/2020, Vol. 11323, p1132308-1132308, 1p
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제한된 항목
[AR] Mallmann, Joerg
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