학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 47건 | 목록 1~10
Conference
1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395) Plasma process-induced damage Plasma Process-Induced Damage, 1999 4th International Symposium on. :88-91 1999
Conference
1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) Semiconductor manufacturing technology Semiconductor Manufacturing Technology Workshop, 1998. :57-60 1998
Conference
International Electron Devices Meeting. IEDM Technical Digest Electron Devices Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International. :851-854 1997
Conference
International Electron Devices Meeting. Technical Digest Electron devices Electron Devices Meeting, 1996. IEDM '96., International. :837-840 1996
Conference
Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247) Interconnect technology Interconnect Technology, 1999. IEEE International Conference. :65-67 1999
Academic Journal
Journal of Applied Physics. 10/15/1989, Vol. 66 Issue 8, p3604. 8p. 18 Black and White Photographs, 3 Charts, 1 Graph.
Academic Journal
Journal of Applied Physics. 10/1/1988, Vol. 64 Issue 7, p3505. 7p. 13 Black and White Photographs, 3 Charts, 1 Graph.
Conference
In: International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings. (International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings, 1999, :88-91)
Conference
In: Materials Research Society Symposium - Proceedings. (Materials Research Society Symposium - Proceedings, 1999, 564:177-182)
Academic Journal
In: Journal of the Electrochemical Society. (Journal of the Electrochemical Society, October 2002, 149(10):F145-F148)
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제한된 항목
[AR] Lur, W.
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