학술논문
'학술논문'
에서 검색결과 7건 | 목록
1~10
Conference
Hinnen, P.; Wang, V.; Mardanpour, H.; Beltman, J.; Rottenkolber, E.; Leewis, C.; Brunner, T.A.; Wong, C.W.; Rawat, P.
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI. :352-359 May, 2013
Conference
Kang, M.-S.; Hwang, C.; Lee, S.; Lee, J.; Park, J.-S.; Leewis, C.; Yang, E.-J.; Lee, D.-H.; Lee, J.; Huda, S.; Park, N.-K.; Tsiatmas, A.; Bottegal, G.; Wang, A.; Belletti, F.; Venselaar, J.J.; Miceli, G.; Saj, I.; Chen, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11325)
Conference
Hu, J.; Chen, Y.L.; Chen, K.H.; Lee, B.; Tsai, F.; Ke, C.M.; Liao, C.H.; Ngo, D.; Gosali, B.; Huang, V.; Tu, W.; Tijssen, R.; Noot, M.; Escalante Marun, M.; Leewis, C.; Staals, F.; Van Veen, M.; Furthner, F.; Young, S.; Bhattacharyya, K.; Luijten, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Conference
Cramer, H.; Petra, S.; Fagginger Auer, B.O.; Smilde, H.-J.; Wisse, B.; Welch, S.; Kruijswijk, S.; Hinnen, P.; Segers, B.; Leewis, C.; Staals, F.; Escalante Marun, M.; Young, S.; Guo, W.; Den Boef, A.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9424)
Conference
Wong, C.; Seevaratnam, G.; Wiltshire, T.; Felix, N.; Brunner, T.; Rawat, P.; Escalante, M.; Elmalk, A.; Wang, V.; Leewis, C.; Hinnen, P.; Kim, W.; Rottenkolber, E.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
Finders, J.; Vleeming, B.; Fliervoet, T.; Hepp, B.; Megens, H.; Groenendijk, R.; Quaedackers, J.; Mos, E.; Leewis, C.; Bornebroek, F.; Dusa, M.; Maenhoudt, M.; Leblans, M.; Vandeweyer, T.; Murdoch, G.; Sanchez, E.A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7274)
Periodical
Starikov, Alexander; Cain, Jason P.; Wong, C.; Seevaratnam, G.; Wiltshire, T.; Felix, N.; Brunner, T.; Rawat, P.; Escalante, M.; Kim, W.; Rottenkolber, E.; Elmalk, A.; Wang, V.; Leewis, C.; Hinnen, P.
Proceedings of SPIE; April 2013, Vol. 8681 Issue: 1 p868137-868137-11
검색 결과 제한하기
제한된 항목
[AR] Leewis, C.
발행연도 제한
-
학술DB(Database Provider)
저널명(출판물, Title)
출판사(Publisher)
자료유형(Source Type)
주제어
언어