학술논문
'학술논문'
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1~10
Academic Journal
Graves, David B.; Labelle, Catherine B.; Kushner, Mark J.; Aydil, Eray S.; Donnelly, Vincent M.; Chang, Jane P.; Mayer, Peter; Overzet, Lawrence; Shannon, Steven; Rauf, Shahid; Ruzic, David N.
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jul2024, Vol. 42 Issue 4, p1-25, 25p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Tao, Z.; Zhang, L.; Dupuy, E.; Chan, B. T.; Altamirano-Sanchez, E.; Lazzarino, F.
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290O-113290O-7, 1019618p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Dineen, Mark; Loveday, Matthew; Goodyear, Andy; Cooke, Mike; Newton, Andrew; Baclet, Stephanie; Ward, Craig; Hemakumara, Tania
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290I-113290I-8, 1019619p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Buzi, L.; Papalia, J. M.; Khojasteh, M. M.; Miyazoe, H.; Hopstaken, M.; Molis, S.; Bruce, R. L.; Engelmann, S. U.
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290S-113290S-7, 1019618p
Cycling of implantation step and remote plasma process step for nitride spacer etching applications.
Periodical
Wise, Richard S.; Labelle, Catherine B.; Loubet, Nicolas Alexandre; Jenny, Cécile; Petit-Etienne, Camille; Pargon, Erwine
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290G-113290G-9, 1019620p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Kearney, Kara; Chopra, Sonali; Zhu, Xilan; Ban, Yang; Bonnecaze, Roger T.; Chopra, Meghali C.
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290Z-113290Z-7, 1019618p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Medina, Leandro; Sundahl, Bryan; Chopra, Meghali C.; Bonnecaze, Roger T.
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290C-113290C-10, 11215721p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Philippi, Caitlin; Thibaut, Sophie; Metz, Andrew; Ko, Akiteru; Raley, Angélique; Biolsi, Peter
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290T-113290T-9, 1019620p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Halle, Scott D.; Bloomfield, Max O.; Gabor, Allen H.; Dunn, Derren; Shephard, Mark
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290B-113290B-12, 11215723p
Periodical
Wise, Richard S.; Labelle, Catherine B.; Metzler, Dominik; Oulmane, Mohamed; Mukesh, Sagarika; Stopford, Phil; Yogendra, Karthik; Melvin, Lawrence
Proceedings of SPIE; March 2020, Vol. 11329 Issue: 1 p113290H-113290H-9, 1019620p
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[AR] Labelle, Catherine B.
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