학술논문
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Application of scatterometry for CD and profile metrology in 193-nm lithography process development.
Conference
Chen, Li-Jui; Ke, Chih-Ming; Yu, Shinn Sheng; Gau, Tsai-Sheng; Chen, Pei-Hung; Ku, Yao Ching; Lin, Burn J.; Engelhard, Dan; Hetzer, Dave; Yang, Jason Y.; Barry, Kelly A.; Yap, Lip; Yang, Wenge
Proceedings of SPIE; Nov2003, Issue 1, p568-576, 9p
Conference
Proceedings of SPIE; Nov2002, Issue 1, p1296-1307, 12p
Conference
Proceedings of SPIE; Nov2001, Issue 1, p275-286, 12p
Conference
Wang, Ying-Ying; Lin, Hua Tai; Yu, Shinn Sheng; Chen, Chun-Kuang; Ku, Yao Ching; Yen, Anthony; Lin, Burn J.
Proceedings of SPIE; Nov2001, Issue 1, p276-292, 17p
Conference
Yip, Raymond; Chu, Mico; Fu, Steven; Castro, Dave; Ng, Waiman; Anderson, Geoffrey T.; Sherrill, Micheal J.; Chen, Norman; Ku, Yao Ching
Proceedings of SPIE; Nov1999, Issue 1, p262-276, 15p
Conference
Proceedings of SPIE; Nov1995, Issue 1, p796-803, 8p
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제한된 항목
[AR] Ku, Yao Ching
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