학술논문
'학술논문'
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1~10
Academic Journal
Kim, Y.; Seo, S.; Consiglio, S.; Jamison, P.; Higuchi, H.; Rasch, M.; Wu, E.Y.; Kong, D.; Saraf, I.; Catano, C.; Muralidhar, R.; Nguyen, S.; DeVries, S.; Van der Straten, O.; Sankarapandian, M.; Pujari, R.N.; Gasasira, A.; Mcdermott, S.M.; Miyazoe, H.; Koty, D.; Yang, Q.; Yan, H.; Clark, R.; Tapily, K.; Engelmann, S.; Robison, R.R.; Wajda, C.; Mosden, A.; Tsunomura, T.; Soave, R.; Saulnier, N.; Haensch, W.; Leusink, G.; Biolsi, P.; Narayanan, V.; Ando, T.
IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 42(5):759-762 May, 2021
Conference
Gong, N.; Rasch, M.J.; Seo, S.-C.; Gasasira, A.; Solomon, P.; Bragaglia, V.; Consiglio, S.; Higuchi, H.; Park, C.; Brew, K.; Jamison, P.; Catano, C.; Saraf, I.; Athena, F.F.; Silvestre, C.; Liu, X.; Khan, B.; Jain, N.; Mcdermott, S.; Johnson, R.; Estrada-Raygoza, I.; Li, J.; Gokmen, T.; Li, N.; Pujari, R.; Carta, F.; Miyazoe, H.; Frank, M.M.; Koty, D.; Yang, Q.; Clark, R.; Tapily, K.; Wajda, C.; Mosden, A.; Shearer, J.; Metz, A.; Teehan, S.; Saulnier, N.; Offrein, B. J.; Tsunomura, T.; Leusink, G.; Narayanan, V.; Ando, T.
2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :33.7.1-33.7.4 Dec, 2022
Conference
Borges, J.; Yan, H.; Gignac, L.; Ocola, L.; Hopstaken, M.; Molis, S.; Bruce, R.L.; Simon, A.; Arnold, J.; Koty, D.; Rogalskyj, S.; Shearer, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology and Process Integration for Nanopatterning XIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12958)
Conference
Isowamwen, O.; Marchack, N.; Nguyen, H.; Molis, S.; Hopstaken, M.; Bruce, R.L.; Koty, D.; Yang, Q.; Lefevre, S.; Metz, A.; Shearer, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology and Process Integration for Nanopatterning XII. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12499)
Conference
Papalia, J.M.; Marchack, N.; Engelmann, S.U.; Bruce, R.L.; Koty, D.; Lefevre, S.; Yang, Q.; Mosden, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology and Process Integration for Nanopatterning XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12056)
Conference
Buzi, L.; Hopstaken, M.; Bruley, J.; Gignac, L.; Sagianis, M.; Farmer, D.; Miyazoe, H.; Engelmann, S.; Bruce, R.L.; Koty, D.; Mosden, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology and Process Integration for Nanopatterning XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12056)
Periodical
Bannister, Julie; Mohanty, Nihar; Buzi, L.; Koty, D.; Hopstaken, M.; Bruley, J.; Gignac, L.; Sagianis, M.; Farmer, D.; Miyazoe, H.; Mosden, A.; Engelmann, S.; Bruce, R. L.
Proceedings of SPIE; May 2022, Vol. 12056 Issue: 1 p1205609-1205609-7
Periodical
Metallurgical and Materials Transactions A; November 1996, Vol. 27 Issue: 11 p3727-3738, 12p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 25th Annual BACUS Symposium on Photomask Technology. (Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5992(1))
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[AR] Koty, D.
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