학술논문
'학술논문'
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1~10
Conference
Halle, Scott D.; Hotta, Shoji; Koay, Chiew-seng; Chen, Shyng-Tsong; Kato, Takeshi; Yamaguchi, Atsuko; Colburn, Matthew
2012 SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI. :321-326 May, 2012
Conference
Holmes, Steven J.; Tang, Cherry; Burns, Sean; Yin, Yunpeng; Chen, Rex; Koay, Chiew-seng; Kini, Sumanth; Tomizawa, Hideyuki; Chen, Shyng-Tsong; Fender, Nicolette; Osborn, Brian; Singh, Lovejeet; Petrillo, Karen; Landie, Guillaume; Halle, Scott; Liu, Sen; Arnold, John C.; Spooner, Terry; Varanasi, Rao; Slezak, Mark; Colburn, Matthew; Dunn, Shannon; Hetzer, David; Kawakami, Shinichiro; Cantone, Jason
2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI. :1-8 May, 2011
Conference
Chen, Shyng-Tsong; Kim, Tae-Soo; Nam, Seo-woo; Lafferty, Neal; Koay, Chiew-Seng; Saulnier, Nicole; Wang, Wenhui; Xu, Yongan; Duclaux, Benjamin; Mignot, Yann; Beard, Marcy; Yin, Yunpeng; Shobha, Hosadurga; Van der Straten, Oscar; He, Ming; Kelly, James; Colburn, Matthew; Spooner, Terry
2013 IEEE International Interconnect Technology Conference - IITC Interconnect Technology Conference (IITC), 2013 IEEE International. :1-3 Jun, 2013
Conference
Chen, James Hsueh-Chung; Waskiewicz, Christopher; Fan, Susan Su-Chen; Halle, Scott; Koay, Chiew-seng; Xu, Yongan; Saulnier, Nicole; Tseng, Chia-Hsun; Yin, Yunpeng; Mignot, Yann; Beard, Marcy; Morris, Bryan; Horak, Dave; Mignot, Sylvie; Shobha, Hosadurga; Sankarapandian, Muthumanickam; van der Straten, Oscar; Kelly, James J.; Canaperi, Donald; Mclellan, Erin; Boye, Carol; Levin, Theodore; Li, Juntao; Demarest, James; Choi, Samuel; Huang, Elbert; Liemann, Lars; Haran, Bala; Arnold, John C; Colburn, Matthew; Clevenger, Larry; Spooner, Terry
2012 IEEE International Interconnect Technology Conference Interconnect Technology Conference (IITC), 2012 IEEE International. :1-3 Jun, 2012
Periodical
Sanchez, Martha I.; Ukraintsev, Vladimir A.; Koay, Chiew-seng; Hamieh, Bassem; Felix, Nelson; Gaudiello, John
Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101450B-101450B-10, 10043561p
Conference
Mizuno, Hiroyuki; McIntyre, Gregory; Koay, Chiew-seng; Burkhardt, Martin; He, Long; Hartley, John; Johnson, Corbet; Raghunathan, Sudharshanan; Goldberg, Kenneth; Mochi, Iacopo; La Fontaine, Bruno; Wood, Obert
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p73790J-73790J-11, 11p
Conference
Mizuno, Hiroyuki; McIntyre, Gregory; Koay, Chiew-seng; Burkhardt, Martin; La Fontaine, Bruno; Wood, Obert
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72710U-72710U-8, 8p
Conference
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72711C-72711C-12, 12p
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Conference
Wallow, Thomas I.; Pierson, Bill; Mizuno, Hiroyuki; Fumar-Pici, Anita; Petrillo, Karen; Anderson, Chris N.; Naulleau, Patrick P.; Hansen, Steven G.; Deng, Yunfei; van Ingen Schenau, Koen; Koay, Chiew-Seng; Ohara, Linda; Han, Sang-In; Watso, Robert; Huli, Lior; Burkhardt, Martin; Wood, Obert; Mallmann, Joerg; Kessels, Bart; Routh, Robert
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Conference
Wood, Obert; Koay, Chiew-Seng; Petrillo, Karen; Mizuno, Hiroyuki; Raghunathan, Sudhar; Arnold, John; Horak, Dave; Burkhardt, Martin; McIntyre, Gregory; Deng, Yunfei; La Fontaine, Bruno; Okoroanyanwu, Uzodinma; Tchikoulaeva, Anna; Wallow, Tom; Chen, James H.-C.; Colburn, Matthew; Fan, Susan S.-C.; Haran, Bala S.; Yin, Yunpeng
Proceedings of SPIE; Nov2009, Issue 1, p727104-727104-10, 10p
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제한된 항목
[AR] Koay, Chiew-seng
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