학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 16건 | 목록 1~10
Conference
2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072) Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI. :199-202 2000
Academic Journal
In: Proceedings of SPIE-The International Society for Optical Engineering. (Proceedings of SPIE-The International Society for Optical Engineering, 2002, 4689 I:531-540)
Academic Journal
In: Proceedings of SPIE-The International Society for Optical Engineering. (Proceedings of SPIE-The International Society for Optical Engineering, 2002, 4689 I:223-236)
Academic Journal
In: MICRO. (MICRO, October 2000, 18(9):55-68)
Conference
In: Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, 2012, :262-266)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control for Microlithography XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6518(PART 3))
Conference
In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIX. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 2005, 5752(III):1300-1306)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2003, 5038 I:608-617)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2003, 5038 I:483-492)
Academic Journal
In: MICRO. (MICRO, April 2006, 24(3):35-40)
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제한된 항목
[AR] Knutrud, P.
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