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발행년	- (예 : 2010-2015)

Compensation of long-range process effects on photomasks by design data correction

Conference

Blöcker, M.; Ballhorn, G.; Schneider, J.; Belic, N.; Eisenmann, H.; Keogan, D.

In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2003, 5148:179-188)

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Integrating CD and lithographic process window analysis with mask data preparation for subwavelength ICs

Conference

Joshi, D.; Keogan, D.; Falbo, J.K.

In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2002, 4889(1):74-82)

Scopus Find it@PNU

Compensation of long-range process effects on photomasks by design data correction

Conference

Schneider, J.; Blöcker, M.; Ballhorn, G.; Belic, N.; Eisenmann, H.; Keogan, D.

In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2002, 4889(1):59-66)

Scopus Find it@PNU

Advanced and highly reliable distributed computing in a fully automated environment

Conference

Ballhorn, G.; Bloecker, M.; Keogan, D.; Moberts, P.

In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2002, 4889(2):861-870)

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Further developments in distributed hierarchical processing

Conference

DePesa, P.; Keogan, D.

In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2002, 4889(2):853-860)

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Distributed hierarchical processing

Conference

DePesa, P.; Keogan, D.

In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2002, 4754:85-90)

Scopus Find it@PNU

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