학술논문
'학술논문'
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1~10
Conference
Kojima, Yosuke; Shirasaki, Masanori; Chiba, Kazuaki; Tanaka, Tsuyoshi; Inazuki, Yukio; Yoshikawa, Hiroki; Okazaki, Satoshi; Iwase, Kazuya; Ishikawa, Kiichi; Ozawa, Ken
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p66070C-66070C-11, 11p
Mask specifications for 45-nm node: the impact of immersion lithography and polarized light imaging.
Conference
Proceedings of SPIE; Nov2006, Issue 1, p628337-628337-11, 11p
Conference
Iwase, Kazuya; Thunnakart, Boontarika; Kaneguchi, Tokihisa; Ozawa, Ken; Yokoyama, Toshifumi; Morikawa, Yasutaka; Uesawa, Fumikatsu
Proceedings of SPIE; Nov2006, Issue 1, p634951-634951-9, 9p
Conference
Proceedings of SPIE; Nov2005 Part 2, Issue 1, p59920Y-59920Y-10, 10p
Conference
Proceedings of SPIE; Nov2005, Issue 1, p265-276, 12p
Conference
Yoshizawa, Masaki; Iwase, Kazuya; Ohtorii, Hiizu; Oguni, Kumiko; Hane, Hiroki; Amai, Keiko; Moriya, Shigeru; Nakano, Hiroyuki; Kitagawa, Tetsuya
Proceedings of SPIE; Nov2004, Issue 1, p1052-1059, 8p
Conference
Kitagawa, Tetsuya; Yoshizawa, Masaki; Iwase, Kazuya; Omori, Shinji; Nohama, Shoji; Nakano, Hiroyuki; Moriya, Shigeru; Kawahira, Hiroichi
Proceedings of SPIE; Nov2004, Issue 1, p537-545, 9p
Conference
Iwase, Kazuya; Omori, Shinji; Nohama, Shoji; Yotsui, Kenta; Suzuki, Gaku; Sasaki, Yushin; Itoh, Kojiro; Tamura, Akira; Maruyama, Satoru; Moriya, Shigeru; Kitagawa, Tetsuya
Proceedings of SPIE; Nov2004, Issue 1, p915-922, 8p
Conference
Nohama, Shoji; Omori, Shinji; Iwase, Kazuya; Watanabe, Yoko; Amai, Keiko; Sasaki, Takayuki; Moriya, Shigeru; Kitagawa, Tetuya
Proceedings of SPIE; Nov2003, Issue 1, p970-978, 9p
Conference
Omori, Shinji; Iwase, Kazuya; Watanabe, Yoko; Amai, Keiko; Sasaki, Takayuki; Nohama, Shoji; Ashida, Isao; Moriya, Shigeru; Kitagawa, Tetuya
Proceedings of SPIE; Nov2003, Issue 1, p958-969, 12p
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제한된 항목
[AR] Iwase, Kazuya
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