학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 13건 | 목록 1~10
Academic Journal
In: Journal of Micro/Nanolithography, MEMS, and MOEMS. (Journal of Micro/Nanolithography, MEMS, and MOEMS, 2009, 8(1))
Periodical
In: Microlithography World. (Microlithography World, February 2007, 16(1):4+6+8+12)
Academic Journal
In: Journal of Policy History. (Journal of Policy History, 1 July 2017, 29(3):431-461)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7274)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7274)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Alternative Lithographic Technologies. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7271)
Conference
In: Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008, Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008. (Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008, 2008, 43:10-15)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical Microlithography XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6924)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Lithography Asia 2008. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 7140)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Photomask and Next-Generation Lithography Mask Technology XV. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 7028)
검색 결과 제한하기
제한된 항목
[AR] Hazelton, A.J.
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