학술논문
'학술논문'
에서 검색결과 13건 | 목록
1~10
Academic Journal
Hazelton, A.J.; Wakamoto, S.; Hirukawa, S.; Magome, N.; Ishikawa, J.; McCallum, M.; Lapeyre, C.; Guilmeau, I.; Barnola, S.; Gaugiran, S.
In: Journal of Micro/Nanolithography, MEMS, and MOEMS . (Journal of Micro/Nanolithography, MEMS, and MOEMS, 2009, 8(1))
Periodical
In: Microlithography World . (Microlithography World, February 2007, 16(1):4+6+8+12)
Academic Journal
In: Journal of Policy History . (Journal of Policy History, 1 July 2017, 29(3):431-461)
Conference
Hazelton, A.J.; Magome, N.; Wakamoto, S.; Tokui, A.; Lapeyre, C.; Barnola, S.; Jullien, G.; Salvetat, V.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7274)
Conference
Lapeyre, C.; Barnola, S.; Servin, I.; Gaugiran, S.; Salvetat, V.; Magome, N.; Hazelton, A.J.; McCallum, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7274)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Alternative Lithographic Technologies. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7271)
Conference
Binnard, M.; Gaugiran, S.; Hazelton, A.J.; Wakamoto, S.; Hirukawa, S.; Magome, N.; Ishikawa, J.; McCallum, M.; Lapeyre, C.; Guilmeau, I.; Barnola, S.
In: Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008 , Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008. (Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008, 2008, 43:10-15)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6924)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Lithography Asia 2008. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 7140)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XV. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 7028)
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제한된 항목
[AR] Hazelton, A.J.
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