학술논문
'학술논문'
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Academic Journal
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 March 2024, 42(2))
Academic Journal
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 March 2024, 42(2))
Academic Journal
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, January 2024, 42(1))
Academic Journal
Schels, A.; Herdl, F.; Hansch, W.; Hausladen, M.; Schreiner, R.; Wohlfartsstätter, D.; Edler, S.; Bachmann, M.; Pahlke, A.
In: Micromachines . (Micromachines, November 2023, 14(11))
Academic Journal
IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 68(8):4116-4122 Aug, 2021
Academic Journal
Bachmann, M.; Düsberg, F.; Pahlke, A.; Edler, S.; Schels, A.; Herdl, F.; Hausladen, M.; Buchner, P.; Schreiner, R.
In: Vakuum in Forschung und Praxis . (Vakuum in Forschung und Praxis, June/July 2023, 35(3):32-37)
Academic Journal
Dam Madsen, N.; Hausladen, M.; Chiriaev, S.; Johannesen, P.; Fabrim, Z.E.; Fichtner, P.F.P.; Kjelstrup-Hansen, J.
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 25(4):683-690 Aug, 2016
Academic Journal
Edler, S.; Schels, A.; Herdl, F.; Hansch, W.; Bachmann, M.; Dudeck, M.; Düsberg, F.; Pahlke, A.; Hausladen, M.; Buchner, P.; Schreiner, R.
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 January 2022, 40(1))
Academic Journal
Schels, A.; Edler, S.; Herdl, F.; Hansch, W.; Bachmann, M.; Ritter, D.; Dudeck, M.; Düsberg, F.; Meyer, M.; Pahlke, A.; Hausladen, M.; Buchner, P.; Schreiner, R.
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 January 2022, 40(1))
Academic Journal
Bachmann, M.; Düsberg, F.; Langer, C.; Herdl, F.; Bergbreiter, L.; Dams, F.; Miyakawa, N.; Eggert, T.; Pahlke, A.; Edler, S.; Prommesberger, C.; Ławrowski, R.; Hausladen, M.; Schreiner, R.
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 March 2020, 38(2))
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제한된 항목
[AR] Hausladen, M.
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