학술논문
'학술논문'
에서 검색결과 60건 | 목록
1~10
Academic Journal
Journal of Chemical Physics; Oct1980, Vol. 73 Issue 8, p3750-3762, 13p
Academic Journal
Academic Journal
Journal of Chemical Physics; Oct1976, Vol. 65 Issue 7, p2908-2910, 3p
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Conference
Wallow, Thomas I.; Pierson, Bill; Mizuno, Hiroyuki; Fumar-Pici, Anita; Petrillo, Karen; Anderson, Chris N.; Naulleau, Patrick P.; Hansen, Steven G.; Deng, Yunfei; van Ingen Schenau, Koen; Koay, Chiew-Seng; Ohara, Linda; Han, Sang-In; Watso, Robert; Huli, Lior; Burkhardt, Martin; Wood, Obert; Mallmann, Joerg; Kessels, Bart; Routh, Robert
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Conference
Robertson, Stewart A.; Naulleau, Patrick P.; O'Connell, Donna J.; McDonald, Kevin; Delano, Todd M.; Goldberg, Kenneth A.; Hansen, Steven G.; Brown, Kirk W.; Brainard, Robert L.
Proceedings of SPIE; Nov2003, Issue 1, p900-909, 10p
Conference
de Klerk, Jos; Jorritsma, Louis; van Setten, Eelco; Droste, Richard; du Croo de Jongh, Richard; Hansen, Steven G.; Smith, Dan; van de Kerkhof, Mark A.; van de Mast, Frank; Graeupner, Paul; Rohe, Thomas; Kornitzer, Klaus
Proceedings of SPIE; Nov2003, Issue 1, p822-840, 19p
Conference
Roy, Sabita; Schlief, Ralph E.; Hsu, Stephen; Shi, Xuelong; Liebchen, Armin; Chen, J. Fung; Hansen, Steven G.
Proceedings of SPIE; Nov2002, Issue 1, p876-883, 8p
Conference
Proceedings of SPIE; Nov2002, Issue 1, p512-521, 10p
검색 결과 제한하기
제한된 항목
[AR] Hansen, Steven G.
발행연도 제한
-
학술DB(Database Provider)
저널명(출판물, Title)
출판사(Publisher)
자료유형(Source Type)
주제어
언어