학술논문
'학술논문'
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Academic Journal
Mukhopadhyay, P.; Fletcher, I.; Caribe Couvertier, Z.; Fulford, J.; Schoenfeld, W.V.; Schwab, B.; Gumpher, J.; Kretzschmar, J.; de Villiers, A.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 May 2024, 42(3))
Academic Journal
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 16(1):26-35 Feb, 2003
Academic Journal
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 29(3):217-222 Aug, 2016
Academic Journal
In: Journal of the Electrochemical Society . (Journal of the Electrochemical Society, 2004, 151(5):G353-G359)
Conference
Nagata, K.; Hashiguchi, H.; Yamaguchi, T.; Ogura, A.; Oji, H.; Son, J.; Hirosawa, I.; Tanaka, Y.; Hirota, Y.; Gumpher, J.; Yamashita, K.
In: ECS Transactions , Physics and Technology of High-k Materials 9. (ECS Transactions, 2011, 41(3):109-114)
Conference
In: Proceedings - Electrochemical Society , Advances Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment - Proceedings of the International Symposium. (Proceedings - Electrochemical Society, 2005, PV 2005-05:91-98)
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[AR] Gumpher, J.
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