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Some factors that affect the surface measurement accuracy of a low-coherence interference microscope
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6609)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6609)
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[AR] Foret, Z.
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