학술논문
'학술논문'
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1~10
Periodical
Barry, John; Bolton, Adrian; Brady, Noel; Caldwell, Debbie; Conway, Chris; Donnelly, Michael; Ennis, Mark; Flanigan, Kyle; Hanna, Bob; Hegarty, Kevin; Isherwood, Paul; Lynch, Sara; Madden, Paul; McKeown, Ronan; Neenan, Klair; O’Mullan, Damien; Rodgers, Richard; Sanders, Nathan; Walls, Jacqueline
agendaNi; Apr2023, Issue 113, p60-67, 8p
High Si content anti-reflective coatings and their extension to a UV freeze dual patterning process.
Conference
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p75200O-75200O-12, 12p
Conference
Wu, Ze-Yu; Kennedy, Joseph; Xie, Song-Yuan; Katsanes, Ron; Flanigan, Kyle; Dai, Junyan; Bekiaris, Nikolaos; Cervera, Hiram; Mori, Glen; Wallow, Thomas
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72731I-72731I-12, 12p
Conference
Kennedy, Joseph; Xie, Song-Yuan; Wu, Ze-Yu; Katsanes, Ron; Flanigan, Kyle; Lee, Kevin; Slezak, Mark; Liu, Zhi; Lin, Shang-Ho
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733M-72733M-12, 12p
Conference
Kennedy, Joseph; Xie, Songyuan; Katsanes, Ronald; Flanigan, Kyle; Mukhopadhyay, Sudip; Wu, Benjamin; Rutter Jr., Edward W.; Slezak, Mark
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69230W-69230W-10, 10p
Conference
Kennedy, Joseph; Xie, Song-Yuan; Wu, Ze-Yu; Katsanes, Ron; Flanigan, Kyle; Lee, Kevin; Slezak, Mark; Fender, Nicolette; Takahashi, Junichi
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71402S-71402S-12, 12p
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[AR] Flanigan, Kyle
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